AFM: Atomic Force Microscope (AFM), an analytical instrument that can be used to study the surface structural planes of solid materials, including insulators. It studies the surface structure and properties of substances by detecting extremely weak atomic interactions between the surface of the sample to be tested and a micro force sensing element.

OM: Optical microscope (abbreviated as OM) is a type of microscope that utilizes optical principles to magnify and image small objects that cannot be distinguished by the naked eye, providing an optical instrument for extracting microstructural information. It can observe the crystal structure and surface defects of materials.

SEM: Scanning electron microscope (SEM) is a large-scale precision instrument used for high-resolution micro area morphology analysis. It has the characteristics of large depth of field, high resolution, intuitive imaging, strong stereo sense, wide magnification range, and the ability to rotate and tilt the tested sample in three-dimensional space.

FIB: Focused Ion Beam (FIB) is a micro cutting instrument that uses an electric lens to focus ion beams into very small sizes. FIB is the process of accelerating ion beams generated by ion sources (most FIBs use Ga, and some devices have He and Ne ion sources) through an ion gun, focusing them, and then acting on the surface of the sample.